Square gate valve
"Single gate valve" and "dual gate valve" are now available in the lineup!
This product is a vacuum gate valve for the process chamber of semiconductor manufacturing equipment. We offer a "single gate valve" that is reverse pressure compatible with cam-driven operation, and a "dual gate valve" that features complete horizontal movement, eliminating O-ring wear. Customization based on customer specifications is also available. 【Features】 〈Dual Gate Valve〉 ■ No O-ring wear due to complete horizontal movement ■ Improved maintainability of PM/TM chambers due to independent drive on both sides ■ Compact design (same size as single valve) ■ Compatible with an opening of 45×450mm *For more details, please refer to the PDF document or feel free to contact us.
- Company：ナカンテクノ
- Price：Other
